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Authors: Revyn, N.; Hu, Michel H.Y.; Frimat, Jean-Philippe; de Wagenaar, B.; van den Maagdenberg, Arn M.J.M.; Sarro, Pasqualina M; Mastrangeli, Massimo
Journal title: Proceedings of the 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)
Journal number: 09-13 January 2022
Journal publisher: IEEE
Published year: 2022
DOI identifier: 10.1109/mems51670.2022.9699597