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Authors: Ionut Radu, Eric Desbonnets, Manuel Sellier, Christophe Didier
Journal title: 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
Journal number: Date of Conference: 30 April-3 May 2018
Journal publisher: IEEE
Published year: 2018
Published pages: 143-147
DOI identifier: 10.1109/asmc.2018.8373174
ISBN: 978-1-5386-3748-7
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