SOI Wafer Technology for Advanced Mos Applications

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Authors: Oleg Kononchuk, Didier Landru, Damien Massy, Nadia Ben Mohamed, Youngpil Kim, Pablo Acosta-Alba and François Rieutord

Journal title: 236th ECS meetings

Journal number: Oct 3rd 2018

Journal publisher: © 2018 ECS - The Electrochemical Society

Published year: 2018