Ni/4H-SiC interaction and silicide formation under excimer laser annealing for ohmic contact

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Authors: Paolo Badalà, Simone Rascunà, Brunella Cafra, Anna Bassi, Emanuele Smecca, Massimo Zimbone, Corrado Bongiorno, Cristiano Calabretta, Francesco La Via, Fabrizio Roccaforte, Mario Saggio, Giovanni Franco, Angelo Messina, Antonino La Magna, Alessandra Alberti

Journal title: Materialia

Journal number: 9

Journal publisher: Elsevier

Published year: 2020

Published pages: 100528

DOI identifier: 10.1016/j.mtla.2019.100528

ISSN: 2589-1529