Three-dimensional feature characterization by inline Xe plasma FIB: delayering and deep milling implementation

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Authors: Franz Niedermeier, Agnes Fros, Max Boeckl, Wolfgang Kipferl, Michaela Braun, Albert Birner, Haim Pearl, Thomas Schubert, Allen Lee

Journal title: Metrology, Inspection, and Process Control for Microlithography XXXIV

Journal publisher: SPIE

Published year: 2020

Published pages: 30

DOI identifier: 10.1117/12.2551657

ISBN: 9781510634183