Qualifying Inline Xe Plasma FIB - Returning Milled Wafers Back to Production

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Authors: Franz Niedermeier, Rolf Kammerer, Wolfgang Kipferl, Stephan Henneck, Haim Pearl

Journal title: 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)

Journal publisher: IEEE

Published year: 2020

Published pages: 1-6

DOI identifier: 10.1109/asmc49169.2020.9185315

ISBN: 978-1-7281-5876-1