Ohmic Contacts on p-Type Al-Implanted 4H-SiC Layers after Different Post-Implantation Annealings

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Authors: Monia Spera, Giuseppe Greco, Domenico Corso, Salvatore Di Franco, Andrea Severino, Angelo Alberto Messina, Filippo Giannazzo, Fabrizio Roccaforte

Journal title: Materials

Journal number: 12/21

Journal publisher: MDPI Open Access Publishing

Published year: 2019

Published pages: 3468

DOI identifier: 10.3390/ma12213468

ISSN: 1996-1944