Wobbling Mode AlN-Piezo-MEMS Mirror Enabling 360-Degree Field of View LIDAR for Automotive Applications

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Authors: Tuomas Pensala, Jyrki Kiihamaki, Jukka Kyynarainen, James Dekker, Sergey Gorelick, Panu Pekko, Tapio Pernu, Oili Ylivaara, Feng Gao, Dmitry Morits

Journal title: 2019 IEEE International Ultrasonics Symposium (IUS)

Journal publisher: IEEE

Published year: 2019

Published pages: 1977-1980

DOI identifier: 10.1109/ultsym.2019.8925660

ISBN: 978-1-7281-4596-9