Beam-steering MOEMS system based on a resonant piezoMEMS mirror and a phase-locked loop controller

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Authors: Konsta Ruotsalainen, Dmitry Morits

Journal title: MOEMS and Miniaturized Systems XX

Journal number: Proceedings Volume 11697, MOEMS and Miniaturized Systems XX; 116970I (2021)

Journal publisher: SPIE

Published year: 2021

Published pages: 16

DOI identifier: 10.1117/12.2576871

ISBN: 9781510642300