Defect analysis of Ni-Au/AlN/p-Si MIS capacitors

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Authors: STUCHLÍKOVÁ, Ľubica - DROBNÝ, Jakub - BENKO, Peter - KÓSA, Arpád - MIKOLÁŠEK, Miroslav - CHVÁLA, Aleš - MAREK, Juraj

Journal title: ADEPT 2019 : 7th International conference on advances in electronic and photonic technologies - Proceedings

Journal number: 24.7.2019

Journal publisher: EDIS

Published year: 2019

Published pages: 223-226

ISBN: 978-80-554-1568-0