Novel method of alignment to buried cavities in cavity-SOI wafers for advanced MEMS devices

This is a publication. If there is no link to the publication on this page, you can try the pre-formated search via the search engines listed on this page.

Authors: Christopher Mountain, Marta Kluba, Lambert Bergers, Jaap Snijder, Ronald Dekker

Journal title: Micro and Nano Engineering

Journal number: 5

Journal publisher: Science direct

Published year: 2019

Published pages: 100043

DOI identifier: 10.1016/j.mne.2019.100043

ISSN: 2590-0072