Calculation of Phase Diagrams and First-Principles Study of Germanium Impacts on Phosphorus Distribution in Czochralski Silicon

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Authors: Hongqun Dong, Xiaoma Tao, Mervi Paulasto-Kröckel

Journal title: Journal of Electronic Materials

Journal number: 50/8

Journal publisher: Institute of Electrical and Electronics Engineers

Published year: 2021

Published pages: 4272-4288

DOI identifier: 10.1007/s11664-021-08861-4

ISSN: 0361-5235