Characterization of AlScN-Based Multilayer Systems for Piezoelectric Micromachined Ultrasound Transducer (pMUT) Fabrication

This is a publication. If there is no link to the publication on this page, you can try the pre-formated search via the search engines listed on this page.

Authors: Kristina Bespalova, Elmeri Osterlund, Glenn Ross, Mervi Paulasto-Krockel, Abhilash Thanniyil Sebastian, Cyril Baby Karuthedath, Stefan Mertin, Tuomas Pensala

Journal title: Journal of Microelectromechanical Systems

Journal number: 30/2

Journal publisher: Institute of Electrical and Electronics Engineers

Published year: 2021

Published pages: 290-298

DOI identifier: 10.1109/jmems.2021.3056928

ISSN: 1057-7157