Temperature Stability of Electrode/AlScN Multilayer Systems for pMUT Process Integration

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Authors: Kristina Bespalova, Glenn Ross, Mervi Paulasto-Kruckel, Abhilash Sebastian Thanniyil, Cyril Karuthedath, Stefan Mertin, Tuomas Pensala

Journal title: 2020 IEEE International Ultrasonics Symposium (IUS)

Journal publisher: IEEE

Published year: 2020

Published pages: 1-4

DOI identifier: 10.1109/ius46767.2020.9251496

ISBN: 978-1-7281-5448-0