Towards CMOS Bulk Sensing for In-Situ Evaluation of ALD Coatings for Millimeter Sized Implants

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Authors: Kambiz Nanbakhsh, Riina Ritasalo, Wouter A. Serdijn, Vasiliki Giagka

Journal title: 2020 42nd Annual International Conference of the IEEE Engineering in Medicine & Biology Society (EMBC)

Journal publisher: IEEE

Published year: 2020

Published pages: 3436-3439

DOI identifier: 10.1109/embc44109.2020.9176103

ISBN: 978-1-7281-1990-8