Stability and residual stresses of sputtered wurtzite AlScN thin films

This is a publication. If there is no link to the publication on this page, you can try the pre-formated search via the search engines listed on this page.

Authors: Elmeri Österlund, Glenn Ross, Miguel A. Caro, Mervi Paulasto-Kröckel, Andreas Hollmann, Manuela Klaus, Matthias Meixner, Christoph Genzel, Panu Koppinen, Tuomas Pensala, Agnė Žukauskaitė, Michal Trebala

Journal title: Physical Review Materials

Journal number: 5/3

Journal publisher: American Physical Society

Published year: 2021

DOI identifier: 10.1103/physrevmaterials.5.035001

ISSN: 2475-9953