Laser Debonding Enabling Ultra-Thin Fan-Out WLP Devices

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Authors: Thomas Uhrmann, Matthias Pichler, Julian Bravin, Daniel Burgstaller, Boris Povazay

Journal title: 2018 7th Electronic System-Integration Technology Conference (ESTC)

Journal publisher: IEEE

Published year: 2018

Published pages: 1-5

DOI identifier: 10.1109/estc.2018.8546451

ISBN: 978-1-5386-6814-6