DLTFS Study of Defect Distribution in InAlGaN/GaN/SiC HEMT Heterostructures

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Authors: L. Stuchlikova, J. Drobny, A. Kosa, P. Benko, A. Kopecky, S. L. Delage, J. Kovac

Journal title: 2018 12th International Conference on Advanced Semiconductor Devices and Microsystems (ASDAM)

Journal publisher: IEEE

Published year: 2018

Published pages: 1-4

DOI identifier: 10.1109/asdam.2018.8544477

ISBN: 978-1-5386-7490-1