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Authors: Lars Wischmeier, Paul Gräupner, Peter Kürz, Winfried Kaiser, Jan Van Schoot, Jörg Mallmann, Joost de Pee, Judon Stoeldraijer
Journal title: Extreme Ultraviolet (EUV) Lithography XI
Journal publisher: SPIE
Published year: 2020
Published pages: 4
DOI identifier: 10.1117/12.2543308
ISBN: 9781510634145
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