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Authors: Peter Evanschitzky, Nicole Auth, Tilmann Heil, Christian Felix Hermanns, Andreas Erdmann
Journal title: Journal of Micro/Nanopatterning, Materials, and Metrology
Journal publisher: S P I E - International Society for Optical Engineering
Published year: 2021
DOI identifier: 10.1117/1.jmm.20.4.041205
ISSN: 1932-5150
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