Investigation of HVPE grown layers on MOVPE GaN/sapphire templates for application as drift layer in vertical GaN power devices

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Authors: Tailang Xie, Martin Krupinski, Sven Jachalke, Claudia Silva, Andreas Groser, Jan Gartner, Rico Hentschel, Thomas Mikolajick, Andre Wachowiak

Journal title: 2020 13th International Conference on Advanced Semiconductor Devices And Microsystems (ASDAM)

Journal publisher: IEEE

Published year: 2020

Published pages: 135-138

DOI identifier: 10.1109/asdam50306.2020.9393849

ISBN: 978-1-7281-9776-0