Demonstration of High-quality GaN Epitaxy on 200 mm Engineered Substrates for Vertical Power Device Fabrication

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Authors: Karen Geen, Hahn Herwig, Hu Liang, Matteo Borga, Deepthi Cingu, Shuzhen You, Matthias Marx, Robert Oligschlaeger, Dirk Fahle, Michael Heuken, Vladimir Odnoblyudov, Ozgur Aktas, Cem Basceri, Steaan Decoutere

Journal title: 2021 International Conference on Compound Semiconductor Manufacturing Technology

Journal number: 24-27, May, 2021

Journal publisher: CSMANTECH

Published year: 2021