Demonstration of High-quality GaN Epitaxy on 200 mm Engineered Substrates for Vertical Power Device Fabrication

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Authors: K. Geens, H. Herwig, H. Liang, M. Borga, D. Cingu, S. You, M. Marx, R. Oligschlaeger, D. Fahle, M. Heuken, V. Odnoblyudov, O. Aktas, C. Basceri, S. Decoutere

Journal title: 2021 International Conference on Compound Semiconductor Manufacturing Technology (CS Mantech)

Journal number: 24.5.2021

Journal publisher: CS Mantech

Published year: 2021