Exploration of gate trench module for vertical GaN devices

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Authors: M. Ruzzarin, K. Geens, M. Borga, H. Liang, S. You, B. Bakeroot, S. Decoutere, C. De Santi, A. Neviani, M. Meneghini, G. Meneghesso, E. Zanoni

Journal title: Microelectronics Reliability

Journal number: 114

Journal publisher: Elsevier BV

Published year: 2020

Published pages: 113828

DOI identifier: 10.1016/j.microrel.2020.113828

ISSN: 0026-2714