Integration of 650 V GaN Power ICs on 200 mm Engineered Substrates

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Authors: Xiangdong Li, Karen Geens, Dirk Wellekens, Ming Zhao, Alessandro Magnani, Nooshin Amirifar, Benoit Bakeroot, Shuzhen You, Dirk Fahle, Herwig Hahn, Michael Heuken, Vlad Odnoblyudov, Ozgur Aktas, Cem Basceri, Denis Marcon, Guido Groeseneken, Stefaan Decoutere

Journal title: IEEE Transactions on Semiconductor Manufacturing

Journal publisher: Institute of Electrical and Electronics Engineers

Published year: 2020

Published pages: 534 - 538

DOI identifier: 10.1109/tsm.2020.3017703

ISSN: 0894-6507