Use of Bilayer Gate Insulator in GaN-on-Si Vertical Trench MOSFETs: Impact on Performance and Reliability

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Authors: Kalparupa Mukherjee, Carlo De Santi, Matteo Borga, Shuzhen You, Karen Geens, Benoit Bakeroot, Stefaan Decoutere, Gaudenzio Meneghesso, Enrico Zanoni, Matteo Meneghini

Journal title: Materials

Journal number: 13/21

Journal publisher: MDPI Open Access Publishing

Published year: 2020

Published pages: 4740

DOI identifier: 10.3390/ma13214740

ISSN: 1996-1944