High-speed ultra-accurate direct C2W bonding

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Authors: Birgit Brandstatter, Daniel Aschenwald, Benedikt Auer, Norbert Bilewicz, Ruurd Boomsma, Christoph Kroll, Andreas Mayr, Richard Neumayr, Hannes Rieser, Mario Schernthaner, Hubert Selhofer, Florian Speer, Peter Unterwaditzer, Andras Videki, Martin Widauer, Thomas Widmann

Journal title: 2020 IEEE 70th Electronic Components and Technology Conference (ECTC)

Journal publisher: IEEE

Published year: 2020

Published pages: 1943-1949

DOI identifier: 10.1109/ectc32862.2020.00303

ISBN: 978-1-7281-6180-8