Impact of Micromachining Process on Cu-Sn Solid-Liquid Interdiffusion (SLID) Bonds

Summary

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Authors: Xia, A. Roy, E. Bardalen, H. -V. Nguyen, K. E. Aasmundtveit and P. Ohlckers

Journal title: 2021 23rd European Microelectronics and Packaging Conference & Exhibition (EMPC)

Journal publisher: IEEE

Published year: 2021

DOI identifier: 10.23919/empc53418.2021.9584992