Heat Sink implementation in Back-End of Line for Self-Heating reduction in 22 nm FDSOI MOSFETs

This is a publication. If there is no link to the publication on this page, you can try the pre-formated search via the search engines listed on this page.

Authors: Arka Halder, Lucas Nyssens, Martin Rack, Dimitri Lederer, Jean-Pierre Raskin, Valeriya Kilchytska

Journal title: Solid-State Electronics

Journal publisher: Pergamon Press Ltd.

Published year: 2021

Published pages: 108088

DOI identifier: 10.1016/j.sse.2021.108088

ISSN: 0038-1101