B and Ga Co-Doped Si1−xGex for p-Type Source/Drain Contacts


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Authors: Gianluca Rengo, Clement Porret, Andriy Hikavyy, Erik Rosseel, Mustafa Ayyad, Richard J. H. Morris, Rami Khazaka, Roger Loo, and André Vantomme

Journal title: ECS Journal of Solid State Science and Technology

Journal number: 2022 11 024008

Journal publisher: Electrochemical Society, Inc.

Published year: 2022

Published pages: 24008 (10 pages)

DOI identifier: 10.1149/2162-8777/ac546e

ISSN: 2162-8769