Copper Large-Scale Grain Growth by UV Nanosecond Pulsed Laser Annealing

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Authors: Toshiyuki Tabata, Pierre-Edouard Raynal, Fabien Roze, Sebastien Halty, Louis Thuries, Fuccio Cristiano, Emmanuel Scheid, Fulvio Mazzamuto

Journal title: 2021 IEEE International Interconnect Technology Conference (IITC)

Journal number: 6-9 July 2021

Journal publisher: IEEE

Published year: 2021

Published pages: 1-3

DOI identifier: 10.1109/iitc51362.2021.9537312

ISBN: 978-1-7281-7632-1