Investigation of generalized ellipsometry applications for the detection of structural asymmetries in Gate-all-around FET architectures.

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Authors: Dávid Egri, Emeric Balogh, Attila Sütő, Péter Basa, Miklós Tallián

Journal title: 18th International Conference on Thin Films & 18th Joint Vacuum Conference

Journal number: 22–26 November 2020

Journal publisher: Emeric Balogh

Published year: 2020