Characterization of an RF excited broad beam ion source operating with inert gases

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Authors: Erik Rohkamm, Daniel Spemann, Frank Scholze, Frank Frost

Journal title: Journal of Applied Physics

Journal number: 129/22

Journal publisher: American Institute of Physics

Published year: 2021

Published pages: 223305

DOI identifier: 10.1063/5.0052758

ISSN: 0021-8979