Potential benefits of S/D HDD activation by melt laser annealing in 3D-inte-grated top-tier FDSOI FETs


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Authors: Anne Vandooren, Toshiyuki Tabata, Pierre Eyben, Erik Roseel, A. Hikavyy, Karim Huet, Fulvio Mazzamuto, Eugenio Dentoni Litta, Naoto Horiguchi

Journal title: 2021 International Conference on Solid State Devices and Materials

Journal number: 6-9 September 2021

Journal publisher: The Japan Society of Applied Physics

Published year: 2021

Published pages: 45-46