Impact of the buried oxide thickness in UV laser heated 3D stacks

Summary

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Authors: Pierre Morin, Toshiyuki Tabata, Fabien Rozé, Mohamed Saib, Hilde Thielens, Louis Thuries, Karim Huet, and Fulvio Mazzamuto

Journal title: 2021 International Conference on Solid State Devices and Materials

Journal number: 6-9 September 2021

Journal publisher: The Japan Society of Applied Physics

Published year: 2021

Published pages: 47-48