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Authors: Peter Evanschitzky, Andreas Erdmann
Journal title: Journal of Micro/Nanolithography, MEMS, and MOEMS
Journal number: 16/04
Journal publisher: S P I E - International Society for Optical Engineering
Published year: 2017
Published pages: 1
DOI identifier: 10.1117/1.jmm.16.4.041005
ISSN: 1932-5150
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