Polarization resolved measurements with the new EUV ellipsometer of PTB

This is a publication. If there is no link to the publication on this page, you can try the pre-formated search via the search engines listed on this page.

Authors: Victor Soltwisch, Andreas Fischer, Christian Laubis, Christian Stadelhoff, Frank Scholze, Albrecht Ullrich

Journal title: Extreme Ultraviolet (EUV) Lithography VI

Journal publisher: SPIE

Published year: 2015

Published pages: 942213

DOI identifier: 10.1117/12.2085798