High Mobility Materials on Insulator for Advanced Technology Nodes

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Authors: W. Schwarzenbach, C. Figuet, D. Delprat, C. Veytizou, I. Huyet, C. Tempesta, L. Ecarnot, J. Widiez, V. Loup, J.-M. Hartmann, P. Besson, C. Deguet, F. Mazen, B.-Y. Nguyen, C. Maleville

Journal title: ECS Transactions

Journal number: 66/4

Journal publisher: Electrochemical Society, Inc.

Published year: 2015

Published pages: 31-37

DOI identifier: 10.1149/06604.0031ecst

ISSN: 1938-5862