Predicting LER and LWR in SAQP with 3D virtual fabrication

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Authors: Jiangjiang (Jimmy) Gu, Dalong Zhao, Vasanth Allampalli, Daniel Faken, Ken Greiner, David M. Fried

Journal title: Advanced Etch Technology for Nanopatterning V

Journal publisher: SPIE

Published year: 2016

Published pages: 97820N

DOI identifier: 10.1117/12.2218929