Failure Mode Analysis in Microsecond UV Laser Annealing of Cu Thin Films


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Authors: Remi Demoulin, Richard Daubriac, Louis Thuries, Emmanuel Scheid, Fabien Rozé, Fuccio Cristiano, Toshiyuki Tabata, Fulvio Mazzamuto

Journal title: 2022 IEEE International Interconnect Technology Conference (IITC)

Journal publisher: IEEE

Published year: 2022