Microsecond non-melt UV laser annealing for future 3D-stacked CMOS

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Authors: Toshiyuki Tabata, Fabien Rozé, Louis Thuries, Sebastien Halty, Pierre-Edouard Raynal, Karim Huet, Fulvio Mazzamuto, Abhijeet Joshi, Bulent Basol, Pablo Acosta Alba, Sébastien Kerdilès

Journal title: Applied Physics Express

Journal publisher: Japan Soc of Applied Physics

Published year: 2022

DOI identifier: 10.35848/1882-0786/ac6e2a

ISSN: 1882-0778