Solid Phase Recrystallization in Arsenic Ion-Implanted Silicon-On-Insulator by Microsecond UV Laser Annealing

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Authors: Toshiyuki Tabata, Fabien Rozé, Pablo Acosta Alba, Sebastien Halty, Pierre-Edouard Raynal, Imen Karmous, Sébastien Kerdilés, Fulvio Mazzamuto

Journal title: IEEE Journal of the Electron Devices Society

Journal number: Early Access

Journal publisher: Institute of Electrical and Electronics Engineers Inc.

Published year: 2021

DOI identifier: 10.1109/jeds.2021.3131911

ISSN: 2168-6734