High-Resolution Two-Dimensional Imaging of the 4H-SiC MOSFET Channel by Scanning Capacitance Microscopy

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Authors: P. Fiorenza, M.S. Alessandrino, B. Carbone, A. Russo, F. Roccaforte, F. Giannazzo

Journal title: Nanomaterials

Journal number: 11

Journal publisher: MDPI

Published year: 2021

DOI identifier: 10.3390/nano11061626

ISSN: 2079-4991