Electrical evolution of W and WC Schottky contacts on 4H-SiC at different annealing temperatures

Summary

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Authors: M. Vivona, G. Bellocchi, R. Lo Nigro, S. RascunĂ , F. Roccaforte

Journal title: Semicond. Sci. Technol.

Journal publisher: Institute of Physics Publishing

Published year: 2022

DOI identifier: 10.1088/1361-6641/ac3375

ISSN: 0268-1242