Streamlining Semiconductor Manufacturing of 200 mm and 300 mm Wafers: A Longitudinal Case Study on the Lot-To-Order-Matching Process

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Authors: Christian Flechsig; Jacob Lohmer; Rainer Lasch; Benjamin Zettler; Germar Schneider; Dietrich Eberts

Journal title: Transactions on Semiconductor Manufacturing

Journal number: 3

Journal publisher: Institute of Electrical and Electronics Engineers

Published year: 2022

DOI identifier: 10.1109/TSM.2022.3184041

ISSN:0894-6507

Integrated Development 4.0
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