Simulation of Nitrogen In-Diffusion and its Impact on Silicon Wafer Strength

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Authors: T. Müller, G. Kissinger, D. Kot, M. Gehmlich, M. Boy, A. Vollkopf, A. Sattler, A. Miller

Journal title: 19th Conference on Gettering and Defect Engineering in Semiconductor Technology (GADEST 2021)

Journal publisher: Siltronic

Published year: 2022