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Authors: Oleg Soloviev, Hieu Thao Nguyen, Jacques Noom, and Michel Verhaegen
Journal title: Proc. SPIE 12098, Dimensional Optical Metrology and Inspection for Practical Applications XI
Journal number: 120980G (31 May 2022)
Journal publisher: SPIE
Published year: 2022
DOI identifier: 10.1117/12.2618736
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