A fusion of electronic design, process and metrology in semiconductor manufacturing for improved process optimization and control

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Authors: Anastasiia Doinychko, Andres Torres, Ivan Kissiov, Melody Tao, Sanghyun Choi (Mentor - S-EDA)

Journal title: "ISBIS CONFERENCE 2022 on ""Statistics and Data Science in Business and Industry"""

Journal publisher: ISBIS

Published year: 2022

Published pages: PAg.34

ISBN: 979-12-210-1389-4

Metrology Advances for Digitized ECS industry 4.0
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