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Authors: Toshiyuki Tabata, Karim Huet, Fulvio Mazzamuto, Jean-Luc Everaert, Edward Moore, Leonard M. Rubin, and Dwight Roh
Journal title: The 23rd International Conference on Ion Implantation Technology (IIT 2022)
Journal number: 2022/09/28
Journal publisher: MRS
Published year: 2022
Published pages: WE2.01
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