1D ResNet for Fault Detection and Classification on Sensor Data in Semiconductor Manufacturing

Summary

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Authors: Philip Tchatchoua, Guillaume Graton, Mustapha Ouladsine, Julien Muller, Abraham Traore, Michel Juge

Journal title: International Conference on Control, Automation and Diagnosis (ICCAD)

Journal publisher: IEEE

Published year: 2022

DOI identifier: 10.1109/iccad55197.2022.9853997